NANOPATTERNING OF SILICON-BASED NANOSTRUCTURES BY AFM PROBE

International Journal of Nanoscience 2004 / 02 Vol. 3; Iss. 1n2

NANOPATTERNING OF SILICON-BASED NANOSTRUCTURES BY AFM PROBE

SHEGLOV, D. V., NASTAUSHEV, Yu. V., LATYSHEV, A. V., ASEEV, A. L.
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Volume:
3
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/S0219581X04001833
Date:
February, 2004
File:
PDF, 289 KB
english, 2004
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