Fabrication and properties of GeSi and SiON layers for above-IC integrated optics
Schmitz, Jurriaan, Rangarajan, Balaji, Kovalgin, Alexey YuVolume:
108
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2014.12.022
Date:
June, 2015
File:
PDF, 1.41 MB
english, 2015