Oxygen Plasma and Warm Nitric Acid Surface Activation for Low-Temperature Wafer Bonding
Zhang, Xuanxiong, Olbrechts, Benoit, Raskin, Jean-PierreVolume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2359700
File:
PDF, 617 KB
english, 2006