Monte Carlo simulation of focused helium ion beam induced...

Nanotechnology 2010 / 04 Vol. 21; Iss. 17

Monte Carlo simulation of focused helium ion beam induced deposition

Smith, Daryl A, Joy, David C, Rack, Philip D
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Volume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/17/175302
Date:
April, 2010
File:
PDF, 1.79 MB
english, 2010
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