Epitaxial growth of 2 inch diameter homogeneous AlN single-crystalline films by pulsed laser deposition
Yang, Hui, Wang, Wenliang, Liu, Zuolian, Li, GuoqiangVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/10/105101
Date:
March, 2013
File:
PDF, 1.01 MB
english, 2013