A real-time scheduling method for the cluster tool with...

International Journal of Production Research 2014 / 02 Vol. 52; Iss. 4

A real-time scheduling method for the cluster tool with wafer transfer delay

Lim, Si-Yeong, Park, You-Jin, Lee, Hyun, Hur, Sun
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Volume:
52
Language:
english
Journal:
International Journal of Production Research
DOI:
10.1080/00207543.2013.808774
Date:
February, 2014
File:
PDF, 505 KB
english, 2014
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