Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 3
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Application of double patterning technology to fabricate optical elements: Process simulation, fabrication, and measurement
Babin, S., Glushenko, G., Weber, T., Kaesebier, T., Kley, E.-B., Szeghalmi, A.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3698315
File:
PDF, 1.03 MB
english, 2012