Piezoelectric polydimethylsiloxane films for MEMS transducers
Wang, Jhih-Jhe, Hsu, Tsung-Hsing, Yeh, Che-Nan, Tsai, Jui-Wei, Su, Yu-ChuanVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/1/015013
Date:
January, 2012
File:
PDF, 1.54 MB
english, 2012