SYNCHROTRON RADIATION PHOTOEMISSION AND INFRARED SPECTROSCOPY STUDY OF ADSORPTION AND DECOMPOSITION OF DICHLOROSILANE ON Si(100)(2 × 1)
KAMAKURA, NOZOMU, SHINOHARA, MASANORI, WATANABE, HAYATO, KUWANO, TAKAYUKI, SEYAMA, AKIO, KIMURA, YASUO, NIWANO, MICHIOVolume:
9
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X02003019
Date:
April, 2002
File:
PDF, 336 KB
english, 2002