Depth distributions of MeV-boron implanted into silicon

Radiation Effects and Defects in Solids 1993 / 01 Vol. 125; Iss. 1-3

Depth distributions of MeV-boron implanted into silicon

Burenkov, A. F., Komarov, F. F., Fedotov, S. A., Varichenko, V. S., Zaitsev, A. M., Kazyutchitz, N. M.
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Volume:
125
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159308225498
Date:
January, 1993
File:
PDF, 372 KB
english, 1993
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