Photoresist Materials Based on Organometallic-Containing...

Photoresist Materials Based on Organometallic-Containing Polysulfones

Kim, Seong-Ju, Kim, Ji-Hong, Lee, Dae-Youp, Ko, Young-Hoon, Park, Byung-Sun, Park, Chun-Geun
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Volume:
227
Language:
english
Journal:
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals
DOI:
10.1080/10587259308030985
Date:
April, 1993
File:
PDF, 403 KB
english, 1993
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