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An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices
Liu, Yunfei, Xie, Jing, Zhao, Hui, Luo, Wei, Yang, Jinling, An, Ji, Yang, FuhuaVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/3/035003
Date:
March, 2012
File:
PDF, 1.22 MB
english, 2012