Fully parameterized model of a voltage-driven capacitive coupled micromachined ohmic contact switch for RF applications
Heeb, Peter, Tschanun, Wolfgang, Buser, RudolfVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/3/035002
Date:
March, 2012
File:
PDF, 2.60 MB
english, 2012