Fabrication of Quartz Microcapillary Electrophoresis Chips Using Plasma Etching
Ujiie, Takekazu, Kikuchi, Toshiaki, Ichiki, Takanori, Horiike, YasuhiroVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.3677
Date:
June, 2000
File:
PDF, 185 KB
english, 2000