Morphological Study on Porous Silicon Carbide Membrane...

Japanese Journal of Applied Physics 2012 / 6 Vol. 51

Morphological Study on Porous Silicon Carbide Membrane Fabricated by Double-Step Electrochemical Etching

Omiya, Takuma, Tanaka, Akira, Shimomura, Masaru
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.075501
Date:
June, 2012
File:
PDF, 590 KB
english, 2012
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