Influence of initial growth stages on AlN epilayers grown by metal organic chemical vapor deposition
Balaji, M., Ramesh, R., Arivazhagan, P., Jayasakthi, M., Loganathan, R., Prabakaran, K., Suresh, S., Lourdudoss, S., Baskar, K.Volume:
414
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2014.10.055
Date:
March, 2015
File:
PDF, 5.27 MB
english, 2015