High-throughput fabrication ofinfinitelylong 10 nm slit arrays for terahertz applications
Jeong, Jeeyoon, Rhie, Jiyeah, Jeon, Woojin, Hwang, Cheol Seong, Kim, Dai-SikVolume:
36
Language:
english
Journal:
Journal of Infrared, Millimeter, and Terahertz Waves
DOI:
10.1007/s10762-014-0135-3
Date:
March, 2015
File:
PDF, 850 KB
english, 2015