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Growth and erosion of amorphous carbon (a-C:H) films by low-temperature laboratory plasmas containing H and N mixtures
Thomas Schwarz-Selinger, Christian Hopf, Chao Sun, Wolfgang JacobVolume:
363-365
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.jnucmat.2007.01.005
File:
PDF, 241 KB
english, 2007