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A STUDY OF THE CHARACTERISTICS OF ORGANIC–INORGANIC HYBRID PLASMA-POLYMER THIN FILMS BY CO-DEPOSITION OF TOLUENE AND TEOS
CHO, SANG-JIN, LEE, SUNGWOO, JUNG, DONGGEUN, BOO, JIN-HYOVolume:
17
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X10013989
Date:
June, 2010
File:
PDF, 411 KB
english, 2010