Viscoelastic properties measurements of thin polymer films...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 1

Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patterns

Rognin, Etienne, Landis, Stefan, Davoust, Laurent
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3664088
File:
PDF, 873 KB
english, 2012
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