Microstructural evolution of SiO[sub x] films and its...

Journal of Applied Physics 2008 Vol. 104; Iss. 9

Microstructural evolution of SiO[sub x] films and its effect on the luminescence of Si nanoclusters

Franzò, G., Miritello, M., Boninelli, S., Lo Savio, R., Grimaldi, M. G., Priolo, F., Iacona, F., Nicotra, G., Spinella, C., Coffa, S.
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Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3006735
File:
PDF, 776 KB
english, 2008
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