Characterization of dielectric layers grown at low...

Thin Solid Films 2015 / 02 Vol. 577

Characterization of dielectric layers grown at low temperature by atomic layer deposition

Gieraltowska, Sylwia, Wachnicki, Lukasz, Witkowski, Bartlomiej S., Mroczynski, Robert, Dluzewski, Piotr, Godlewski, Marek
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Volume:
577
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.01.059
Date:
February, 2015
File:
PDF, 1.71 MB
english, 2015
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