Erosion of a-C:H films under interaction with nitrous oxide...

Journal of Nuclear Materials 2009 Vol. 390-391; Iss. none

Erosion of a-C:H films under interaction with nitrous oxide afterglow discharge

R.Kh. Zalavutdinov, A.E. Gorodetsky, V.L. Bukhovets, A.P. Zakharov, I.V. Mazul
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
390-391
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.jnucmat.2009.01.178
File:
PDF, 275 KB
english, 2009
Conversion to is in progress
Conversion to is failed