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Observation of Defects in Thermal Oxides of Polysilicon by Transmission Electron Microscopy Using Copper Decoration
Itsumi, ManabuVolume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837454
File:
PDF, 2.05 MB
english, 1997