A global model for SF 6 plasmas...

Journal of Physics D Applied Physics 2009 / 03 Vol. 42; Iss. 5

A global model for SF 6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

Kokkoris, George, Panagiotopoulos, Apostolos, Goodyear, Andy, Cooke, Mike, Gogolides, Evangelos
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Volume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/5/055209
Date:
March, 2009
File:
PDF, 978 KB
english, 2009
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