The Analysis of Slip Extension and Induced Stress in 300 mm Diameter Wafers on Three-point Symmetrical Support
Fukuda, Tetsuo, Hikazutani, Ken-ichiVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.999
Date:
March, 2000
File:
PDF, 446 KB
english, 2000