High-Quality GaN on AlN Multiple Intermediate Layer with Migration Enhanced Epitaxy by RF-Molecular Beam Epitaxy
Sugihara, Daisuke, Kikuchi, Akihiko, Kusakabe, Kazuhide, Nakamura, Shinichi, Toyoura, Yousuke, Yamada, Takayuki, Kishino, KatsumiVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.l197
Date:
March, 2000
File:
PDF, 162 KB
english, 2000