Buried Tungsten Metal Structure Fabricated by...

Japanese Journal of Applied Physics 2000 / 5 Vol. 39; Iss. Part 2, No

Buried Tungsten Metal Structure Fabricated by Epitaxial-Lateral-Overgrown GaN via Low-Pressure Metalorganic Vapor Phase Epitaxy

Haino, Masahiro, Yamaguchi, Motoo, Miyake, Hideto, Motogaito, Atsushi, Hiramatsu, Kazumasa, Kawaguchi, Yasutoshi, Sawaki, Nobuhiko, Iyechika, Yasushi, Maeda, Takayoshi
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.l449
Date:
May, 2000
File:
PDF, 529 KB
english, 2000
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