[ECS 212th ECS Meeting - Washington, DC (October 7 -...

  • Main
  • [ECS 212th ECS Meeting - Washington, DC...

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Deposition of TiN and TaN by Remote Plasma ALD for Diffusion Barrier Applications

Knoops, Harm, Baggetto, L., Langereis, E., Van de Sanden, M.C.M., Klootwijk, J.H., Roozeboom, F., Niessen, R.A.H., Notten, P.H.L., Kessels, W.M.M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779068
File:
PDF, 353 KB
english, 2007
Conversion to is in progress
Conversion to is failed