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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Deposition of TiN and TaN by Remote Plasma ALD for Diffusion Barrier Applications
Knoops, Harm, Baggetto, L., Langereis, E., Van de Sanden, M.C.M., Klootwijk, J.H., Roozeboom, F., Niessen, R.A.H., Notten, P.H.L., Kessels, W.M.M.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779068
File:
PDF, 353 KB
english, 2007