Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 1
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Quantifying acid generation efficiency for photoresist applications
Tsiartas, Pavlos C., Schmid, Gerard M., Johnson, Heather F., Stewart, Michael D., Willson, C. GrantVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1851537
File:
PDF, 455 KB
english, 2005