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Stress measurements during thin film zirconium oxide growth
Yong-Soo Kim, Yong-Hwan Jeong, Jeong-Nam JangVolume:
412
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.jnucmat.2011.03.001
File:
PDF, 377 KB
english, 2011