[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Application of Atomic Layer Deposition for Gas Permeation Barrier Thin Films
Carcia, Peter F., McLean, Robert, Groner, Markus, Dameron, Arrelaine, George, StevenVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779064
File:
PDF, 270 KB
english, 2007