Thruster Technology Applied to a 30-cm Multipole Sputtering...

AIAA Journal 1977 / 05 Vol. 15; Iss. 5

Thruster Technology Applied to a 30-cm Multipole Sputtering Ion Source

Robinson, Raymond S., Kaufman, Harold R.
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Volume:
15
Language:
english
Journal:
AIAA Journal
DOI:
10.2514/3.60679
Date:
May, 1977
File:
PDF, 783 KB
english, 1977
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