Photoenhanced wet etching of gallium nitride in KOH-based...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2001 Vol. 19; Iss. 5

Photoenhanced wet etching of gallium nitride in KOH-based solutions

Škriniarová, J., Bochem, P., Fox, A., Kordoš, P.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1395615
File:
PDF, 2.26 MB
english, 2001
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