Effect of post-annealing temperatures on thin-film transistors with ZnO/Al2O3 superlattice channels
Ahn, Cheol Hyoun, Kim, So Hee, Kim, Ye Kyun, Lee, Ho Seong, Cho, Hyung KounVolume:
584
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.01.017
Date:
June, 2015
File:
PDF, 1.30 MB
english, 2015