Electrical Properties of Thick Epitaxial Silicon Films...

Electrical Properties of Thick Epitaxial Silicon Films Deposited at High Rates and Low Temperatures by Mesoplasma Chemical Vapor Deposition

Diaz, Jose Mario A., Sawayanagi, Munetaka, Kambara, Makoto, Yoshida, Toyonobu
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.5315
Date:
August, 2007
File:
PDF, 129 KB
english, 2007
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