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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Electrochemical Behavior of Copper in Post-Via-Etch Cleaning Solutions
Bilouk, Sabrina, Pernel, Carole, Nogueira, Ricardo P., Broussous, Lucile, Haumesser, Paul-Henri, Passemard, GerardVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779403
File:
PDF, 692 KB
english, 2007