Defect Clusters in Silicon: Impact on the Performance of...

Defect Clusters in Silicon: Impact on the Performance of Large-Area Devices

Sopori, Bhushan L.
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Volume:
258-263
Year:
1997
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.258-263.527
File:
PDF, 751 KB
1997
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