Accurate determination of film thickness by low-angle X-ray...

Accurate determination of film thickness by low-angle X-ray reflection

Ming, Xu, Tao, Yang, Wen-xue, Yu, Ning, Yang, Cui-xiu, Liu, Zhen-hong, Mai, Wu-yan, Lai, Kun, Tao
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Volume:
9
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/9/11/007
Date:
November, 2000
File:
PDF, 219 KB
english, 2000
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