Curved Silicon Micromirror for Linear Displacement-to-Angle...

IEEE Journal of Selected Topics in Quantum Electronics 2015 / 7 Vol. 21; Iss. 4

Curved Silicon Micromirror for Linear Displacement-to-Angle Conversion With Uniform Spot Size

Sabry, Yasser M., Khalil, Diaa, Saadany, Bassam, Bourouina, Tarik
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Volume:
21
Language:
english
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/jstqe.2014.2375493
Date:
July, 2015
File:
PDF, 4.72 MB
english, 2015
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