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TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM
LI, XINYUE, JIN, YONGZHONG, LIU, DONGLIANG, ZENG, XIANGUANG, YANG, RUISONGVolume:
18
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X1101428X
Date:
February, 2011
File:
PDF, 1.40 MB
english, 2011