Control of InGaAs and InAs facets using metal modulation...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 01 Vol. 33; Iss. 1

Control of InGaAs and InAs facets using metal modulation epitaxy

Wistey, Mark A., Baraskar, Ashish K., Singisetti, Uttam, Burek, Greg J., Shin, Byungha, Kim, Eunji, McIntyre, Paul C., Gossard, Arthur C., Rodwell, Mark J. W.
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4905497
Date:
January, 2015
File:
PDF, 1.27 MB
english, 2015
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