Conductive properties of transparent Ni–In–Zn–O films deposited by combinatorial RF magnetron cosputtering
Oh, Jeung Pyo, Kim, Eun Mi, Jeong, Hyeon Taek, Choi, In Seok, Cha, Sang-Jun, Kim, Young-Baek, Lee, Jong-Ho, Woo, Jeong Ju, Heo, Gi-SeokVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.121102
Date:
December, 2014
File:
PDF, 1.60 MB
english, 2014