Modelling of a large scale reactor for plasma deposition of silicon
Nienhuis, Gert Jan, Goedheer, WimVolume:
8
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/8/2/310
Date:
May, 1999
File:
PDF, 116 KB
english, 1999