Modelling of a large scale reactor for plasma deposition of...

Modelling of a large scale reactor for plasma deposition of silicon

Nienhuis, Gert Jan, Goedheer, Wim
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Volume:
8
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/8/2/310
Date:
May, 1999
File:
PDF, 116 KB
english, 1999
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