Chemical Vapor Deposition of Aluminosilicates from Mixtures...

Chemical Vapor Deposition of Aluminosilicates from Mixtures of SiCl[sub 4], AlCl[sub 3], CO[sub 2], and H[sub 2]

Nitodas, Stephanos F., Sotirchos, Stratis V.
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393312
File:
PDF, 598 KB
english, 2000
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