Monolithic integrated SAW filter based on AlN for...

Semiconductor Science and Technology 2013 / 06 Vol. 28; Iss. 6

Monolithic integrated SAW filter based on AlN for high-frequency applications

Kaletta, Udo Ch, Santos, Paulo V, Wolansky, Dirk, Scheit, Alexander, Fraschke, Mirko, Wipf, Christian, Zaumseil, Peter, Wenger, Christian
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/6/065013
Date:
June, 2013
File:
PDF, 1.04 MB
english, 2013
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