Deposition of Micro-Crystalline β-C3N4 Films by an Inductively-Coupled-Plasma (ICP) Sputtering Method
Hsu, Chia-Yuan, Hong, Franklin Chau-NanVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.l675
Date:
June, 1998
File:
PDF, 473 KB
english, 1998