Study of HCl and Secco Defect Etching for Characterization of Thick sSOI
Abbadie, A., Bedell, S. W., Hartmann, J. M., Sadana, D. K., Brunier, F., Figuet, C., Cayrefourcq, I.Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2740032
File:
PDF, 1.03 MB
english, 2007