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Optical Properties of Surface Micromachining with Randomly Distributed Etch Holes
Tien, Chung-Hao, Lee, Chi-HungVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.1015
Date:
February, 2006
File:
PDF, 192 KB
english, 2006