Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 4
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Surface passivation of GaAs using an ultrathin cubic GaN interface control layer
Anantathanasarn, Sanguan, Hasegawa, HidekiVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1388605
File:
PDF, 621 KB
english, 2001